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ST408 - Effects of Processing Conditions on the Properties of Fe(Se,Te) Thin Films Grown by Sputtering (Contest runner-up)
Effects of Processing Conditions on the Properties of Fe(Se,Te) Thin Films Grown by Sputtering
Tayebeh Mousavi, Chris Grovenor, and Susannah Speller
Department of Materials, University of Oxford
Oxford OX1 3PH, United Kingdom
E-mail: [email protected]
Abstract — We studied the effects of processing conditions on the properties and microstructure of Fey(Se1-xTex) thin films grown on MgO substrates by RF sputtering. The thin films were grown in two ways; in-situ deposition onto heated substrates and deposition onto cold substrates followed by ex-situ annealing processes. Various properties of the deposited Fe(Se,Te) thin films including the phase, texture, surface morphology, composition and superconducting properties were investigated. The results showed that in-situ sputtering leads to higher quality films, e.g. smoother surface, pure phase, more uniform composition and better crystallographic alignment. For the ex-situ grown films, depending on the annealing conditions, phase separation, appearance of the impurity phases such as hexagonal Fe(Se,Te), poor texture, higher Fe-content, non-uniform composition and rough surfaces are developed in the films.
Keywords (Index Terms) — Fe(Se,Te), Microstructure, Sputtering, Thin films.
IEEE/CSC & ESAS SUPERCONDUCTIVITY NEWS FORUM (global edition), January 2015.
Received August 20, 2014; Selected September 29, 2014. Reference ST408; Category 5.
ASC 2014 manuscript 2MOr3A-02 published online in IEEE Trans. Appl. Supercond.
(IEEE XPLORE) DOI: 10.1109/TASC.2014.2373656 on November 26, 2014.