Superconductivity News Forum (SNF)
Full Text, PDF
A Method to Fabricate Biaxially Textured MgO Buffer Layer for HTS Coated Conductor
Shaozhu Xiao1, Feng Feng2, Timing Qu3, Hongyuan Lu2, Xiangsong Zhang2, and Zhenghe Han1
1Applied Superconductivity Research Center, Department of Physics, Tsinghua University, Beijing 100084, China
2Division of Advanced Manufacturing, Graduate School at Shenzhen,Tsinghua University, Shenzhen 518055, China
3State Key Laboratory for Tribology, Department of Mechanical Engineering, Tsinghua University, Beijing 100084, China
3State Key Laboratory for Tribology, Department of Mechanical Engineering, Tsinghua University, Beijing 100084, China
E-mail: [email protected]
Abstract — In this study, a radio frequency magnetron sputtering
system without any assisting ion source was employed to fabricate biaxially textured MgO films on the substrates of amorphous Y2O3/Al2O3/Hastelloy stacks. During the deposition process, the growing MgO film could be bombarded by off-normal energetic particle flux mainly composed of oxygen atoms and negative oxygen ions, which originated from the target surface. MgO could obtain biaxial texture due to such bombardment, thus this method was named as energetic particle self-assist deposition (EPSAD). The texture of EPSAD-MgO films was evaluated by XRD measurement of the post-deposited homoepitaxial MgO layers. An out-of-plane orientation of MgO (111) and a 3-fold symmetric in-plane alignment were found. The MgO texture was optimal when the EPSAD-MgO thickness was about 10 nm. The establishment of biaxial texture during EPSAD process was verified by a control study, the influence of target inclined angle and target-substrate distance was also investigated. Compared with inclined substrate deposition (ISD) and ion beam assisted deposition (IBAD), the mechanism of EPSAD-MgO method was discussed. This study proposed a new method to fabricate biaxially textured MgO buffer layer for coated conductors, more optimization research will be conducted in our future study.
system without any assisting ion source was employed to fabricate biaxially textured MgO films on the substrates of amorphous Y2O3/Al2O3/Hastelloy stacks. During the deposition process, the growing MgO film could be bombarded by off-normal energetic particle flux mainly composed of oxygen atoms and negative oxygen ions, which originated from the target surface. MgO could obtain biaxial texture due to such bombardment, thus this method was named as energetic particle self-assist deposition (EPSAD). The texture of EPSAD-MgO films was evaluated by XRD measurement of the post-deposited homoepitaxial MgO layers. An out-of-plane orientation of MgO (111) and a 3-fold symmetric in-plane alignment were found. The MgO texture was optimal when the EPSAD-MgO thickness was about 10 nm. The establishment of biaxial texture during EPSAD process was verified by a control study, the influence of target inclined angle and target-substrate distance was also investigated. Compared with inclined substrate deposition (ISD) and ion beam assisted deposition (IBAD), the mechanism of EPSAD-MgO method was discussed. This study proposed a new method to fabricate biaxially textured MgO buffer layer for coated conductors, more optimization research will be conducted in our future study.
Keywords (Index Terms) — MgO film, biaxial texture, in-plane orientation, magnetron sputtering.
IEEE/CSC & ESAS SUPERCONDUCTIVITY NEWS FORUM (global edition), January 2016.
Submitted October 5, 2015; Selected November 10, 2015. Reference No. ST482; Category 5.
EUCAS 2015 preprint 1A-M-P-04.01. The final paper version was published online in IEEE Trans. Appl. Supercond. (IEEE Xplore) DOI: 10.1109/TASC.2016.2532960, April 2016.
Submitted October 5, 2015; Selected November 10, 2015. Reference No. ST482; Category 5.
EUCAS 2015 preprint 1A-M-P-04.01. The final paper version was published online in IEEE Trans. Appl. Supercond. (IEEE Xplore) DOI: 10.1109/TASC.2016.2532960, April 2016.