ST426

Fabrication Process and Properties of Fully-Planarized Deep-Submicron Nb/Al-AlOx/Nb Josephson Junctions for VLSI Circuits (Contest winner)

Sergey K. Tolpygo, Vladimir Bolkhovsky, Terence J. Weir, William D. Oliver, Member, IEEE, and Mark A. Gouker, Senior Member, IEEE

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