Paper
STH17
HP72

Niobium 9-Layer Fabrication Process for Superconducting Large-Scale SFQ Circuits

Volume Number:
8
Issue Number:
28
Shuichi Nagasawa, Kenji Hinode, Tetsuro Satoh, Mutsuo Hidaka, Hiroyuki Akaike, Akira Fujimaki, Nobuyuki Yoshikawa, Kazuyoshi Takagi, and Naofumi Takagi

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