Presentation Type
Invited
Code
STP669
Wk1EOr3B-01
A 150-nm Node of an Eight-Nb-layer Fully Planarized Process for Superconductor Electronics
Presentation Menu
Abstract
Sergey Tolpygo, Vladimir Bolkhovsky, Ravi Rastogi, Scott Zarr, Evan Golden, Terence J. Weir, Leonard M. Johnson, Vasili K. Semenov, and Mark A. Gouker