Presentation Type
Invited
Code
STP-721
1EOr2C-01

Progress Towards Superconductor Electronics Fabrication Process with Planarized NbN Layers

Author(s)
Sergey K. Tolpygo, Justin Mallek, Vladimir Bolkhovsky, Ravi Rastogi, Evan B. Golden, Terence J. Weir, Leonard M. Johnson, Mark A. Gouker